- Manufacturing and Macroscopic Properties of Cold Sprayed Cu-Ga Coating Material for Sputtering Target
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Young-Min Jin, Min-Gwang Jeon, Dong-Yong Park, Hyung-Jun Kim, Ik-Hyun Oh, Kee-Ahn Lee
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J Powder Mater. 2013;20(4):245-252.
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DOI: https://doi.org/10.4150/KPMI.2013.20.4.245
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- This study attempted to manufacture a Cu-Ga coating layer via the cold spray process and to investigate the applicability of the layer as a sputtering target material. In addition, changes made to the microstructure and properties of the layer due to annealing heat treatment were evaluated, compared, and analyzed. The results showed that coating layers with a thickness of 520 mm could be manufactured via the cold spray process under optimal conditions. With the Cu-Ga coating layer, the alpha-Cu and Cu_3Ga were found to exist inside the layer regardless of annealing heat treatment. The microstructure that was minute and inhomogeneous prior to thermal treatment changed to homogeneous and dense with a more clear division of phases. A sputtering test was actually conducted using the sputtering target Cu-Ga coating layer (~2 mm thickness) that was additionally manufactured via the cold-spray coating process. Consequently, this test result confirmed that the cold sprayed Cu-Ga coating layer may be applied as a sputtering target material.
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Citations
Citations to this article as recorded by  - Microscopic Examination of Cold Spray Cermet Sn+In2O3Coatings for Sputtering Target Materials
M. Winnicki, A. Baszczuk, M. Rutkowska-Gorczyca, M. Jasiorski, A. Małachowska, W. Posadowski, Z. Znamirowski, A. Ambroziak
Scanning.2017; 2017: 1. CrossRef - Effect of powder alloy composition on the microstructure and properties of kinetic sprayed Cu-Ga based coating materials
Byung-Chul Choi, Dong-Yong Park, Kee-Ahn Lee
Metals and Materials International.2016; 22(4): 649. CrossRef - Manufacturing and Properties of CGI-based Composite Coating Layer Utilizing a Warm Spray Process and Cu-Ga and Cu-In Mixed Powders
Min-Gwang Jeon, Myeong-Ju Lee, Hyeong-Jun Kim, Kee-Ahn Lee
Journal of Korean Powder Metallurgy Institute.2014; 21(3): 229. CrossRef - Manufacturing of Cu Repair Coating Material Using the Kinetic Spray Process and Changes in the Microstructures and Properties by Heat Treatment
Min-Gwang Jeon, Hyung-Jun Kim, Kee-Ahn Lee
Journal of Korean Powder Metallurgy Institute.2014; 21(5): 349. CrossRef
- Effect of Carrier Gases on the Microstructure and Properties of Ti Coating Layers Manufactured by Cold Spraying
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Myeong-Ju Lee, Hyung-Jun Kim, Ik-Hyun Oh, Kee-Ahn Lee
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J Powder Mater. 2013;20(1):24-32.
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DOI: https://doi.org/10.4150/KPMI.2013.20.1.024
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- The effect of carrier gases (He, N_2) on the properties of Ti coating layers were investigated to manufacture high-density Ti coating layers. Cold spray coating layers manufactured using He gas had denser and more homogenous structures than those using N_2 gas. The He gas coating layers showed porosity value of 0.02% and hardness value of Hv 229.1, indicating more excellent properties than the porosity and hardness of N_2 gas coating layers. Bond strengths were examined, and coating layers manufactured using He recorded a value of 74.3 MPa; those manufactured using N_2 gas had a value of 64.6 MPa. The aforementioned results were associated with the fact that, when coating layers were manufactured using He gas, the powder could be easily deposited because of its high particle impact velocity. When Ti coating layers were manufactured by the cold spray process, He carrier gas was more suitable than N_2 gas for manufacturing excellent coating layers.
- Effects of Powder Morphology and Powder Preheating on the Properties and Deposition Behavior of Titanium Coating Layer Manufactured by Cold Spraying
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Jae-Nam Hwang, Myeong-Ju Lee, Hyung-Jun Kim, Ik-Hyun Oh, Kee-Ahn Lee
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J Korean Powder Metall Inst. 2012;19(5):348-355.
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DOI: https://doi.org/10.4150/KPMI.2012.19.5.348
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- Cold spray deposition using Titanium powder was carried out to investigate the effects of powder morphology and powder preheating on the coating properties such as porosity and hardness. The in-flight particle velocity of Ti powder in cold spray process was directly measured using the PIV (particle image velocimetry) equipment. Two types of powders (spherical and irregular ones) were used to manufacture cold sprayed coating layer. The results showed that the irregular morphology particle appeared higher in-flight particle velocity than that of the spherical one under the same process condition. The coating layer using irregular morphology powder represented lower porosity level and higher hardness. Two different preheating conditions (no preheating and preheating at 500°C) were used in the process of cold spraying. The porosity decreased and the hardness increased by conducting preheating at 500°C. It was found that the coating properties using different preheating conditions were dependent not on the particle velocity but on the deformation temperature of particle. The deposition mechanism of particles in cold spray process was also discussed based on the experimental results of in flight-particle velocity.
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Citations
Citations to this article as recorded by - Solid-state cold spray additive manufacturing of pure tantalum with extraordinary high-temperature mechanical properties
Young-Kyun Kim, Hyung-Jun Kim, Kee-Ahn Lee
Journal of Materials Research and Technology.2023; 23: 5698. CrossRef - Effect of Fe Content on the Microstructure and Mechanical Properties of Ti-Al-Mo-V-Cr-Fe Alloys
K.C. Bae, J.J. Oak, Y.H. Kim, Y.H. Park
Archives of Metallurgy and Materials.2017; 62(2): 1105. CrossRef - Effects Of Process Parameters On Cu Powder Synthesis Yield And Particle Size In A Wet-Chemical Process
Y.M. Shin, J.-H. Lee
Archives of Metallurgy and Materials.2015; 60(2): 1247. CrossRef - Property Evaluation of Kinetic Sprayed Al-Ni Composite Coatings
GyeongJun Byun, JaeIck Kim, Changhee Lee, SeeJo Kim, Seong Lee
Journal of Welding and Joining.2014; 32(5): 72. CrossRef - Manufacturing and Properties of CGI-based Composite Coating Layer Utilizing a Warm Spray Process and Cu-Ga and Cu-In Mixed Powders
Min-Gwang Jeon, Myeong-Ju Lee, Hyeong-Jun Kim, Kee-Ahn Lee
Journal of Korean Powder Metallurgy Institute.2014; 21(3): 229. CrossRef - Effect of Carrier Gases on the Microstructure and Properties of Ti Coating Layers Manufactured by Cold Spraying
Myeong-Ju Lee, Hyung-Jun Kim, Ik-Hyun Oh, Kee-Ahn Lee
Journal of Korean Powder Metallurgy Institute.2013; 20(1): 24. CrossRef
- Effect of Heat Treatment Environment on the Densification of Cold Sprayed Ti Coating Layer
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Ji-Sang Yu, Hyung-Jun Kim, Ik-Hyun Oh, Kee-Ahn Lee
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J Korean Powder Metall Inst. 2012;19(2):110-116.
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DOI: https://doi.org/10.4150/KPMI.2012.19.2.110
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18
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- This study investigated the effects of annealing environment for the densification and purification properties of pure titanium coating layer manufactured by cold spraying. The annealing was conducted at 600°C/1 h and three kinds of environments of vacuum, Ar gas, and 5%H_2+Ar mixture gas were controlled. Cold sprayed Ti coating layer (as sprayed) represented 6.7% of porosity and 228 HV of hardness, showing elongated particle shapes (severe plastic deformation) perpendicular to injection direction. Regardless of gas environments, all thermally heat treated coating layers consisted of pure alpha-Ti and minimal oxide. Vacuum environment during heat treatment represented superior densification properties (3.8% porosity, 156.7 HV) to those of Ar gas (5.3%, 144.5 HV) and 5%H_2+Ar mixture gas (5.5%, 153.1 HV). From the results of phase analysis (XRD, EPMA, SEM, EDS), it was found that the vacuum environment during heat treatment could be effective for reducing oxide contents (purification) in the Ti coating layer. The characteristic of microstructural evolution with heat treatment was found to be different at three different gas environments. The controlling method for improving densification and purification in the cold sprayed Ti coating material was also discussed.
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Citations
Citations to this article as recorded by - Effect of Hot Isostatic Pressing on the Microstructure and Propertiesof Kinetic Sprayed Nb Coating Material
Ji-Hye Lee, Sangsun Yang, Kee-Ahn Lee
Journal of Korean Powder Metallurgy Institute.2016; 23(1): 15. CrossRef - Fabrication and Microstructure/Properties of Bulk-typeTantalum Material by a Kinetic Spray Process
Ji-Hye Lee, Ji-Won Kim, Kee-Ahn Lee
Journal of Korean Powder Metallurgy Institute.2016; 23(1): 8. CrossRef - Effect of Heat Treatment Environment on the Microstructure and Properties of Kinetic Sprayed Tantalum Coating Layer
Ji-Hye Lee, Hyung-Jun Kim, Kee-Ahn Lee
Journal of Korean Powder Metallurgy Institute.2015; 22(1): 32. CrossRef - Effect of Powder Preheating Temperature on the Properties of Titanium Coating Layers Manufactured by Kinetic Spraying
Kee-Ahn Lee, Myeong-Ju Lee, Ji-Sang Yu, Hyung-Jun Kim
MATERIALS TRANSACTIONS.2014; 55(3): 622. CrossRef - Effect of Carrier Gases on the Microstructure and Properties of Ti Coating Layers Manufactured by Cold Spraying
Myeong-Ju Lee, Hyung-Jun Kim, Ik-Hyun Oh, Kee-Ahn Lee
Journal of Korean Powder Metallurgy Institute.2013; 20(1): 24. CrossRef - Effects of Powder Morphology and Powder Preheating on the Properties and Deposition Behavior of Titanium Coating Layer Manufactured by Cold Spraying
Jae-Nam Hwang, Myeong-Ju Lee, Hyung-Jun Kim, Ik-Hyun Oh, Kee-Ahn Lee
Journal of Korean Powder Metallurgy Institute.2012; 19(5): 348. CrossRef
- Effect of Heat Treatment Environment on the Properties of Cold Sprayed Cu-15 at.%Ga Coating Material for Sputtering Target
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Byung-Chul Choi, Dong-Yong Park, Hyung-Jun Kim, Ik-Hyun Oh, Kee-Ahn Lee
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J Korean Powder Metall Inst. 2011;18(6):552-561.
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DOI: https://doi.org/10.4150/KPMI.2011.18.6.552
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23
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- This study attempted to manufacture a Cu-15 at.%Ga coating layer via the cold spray process and investigated the effect of heat treatment environment on the properties of cold sprayed coating material. Three kinds of heat treatment environments, 5%H_2+argon, pure argon, and vacuum were used in this study. Annealing treatments were conducted at 200sim800°C/1 hr. With the cold sprayed coating layer, pure alpha-Cu and small amounts of Ga_2O_3 were detected in the XRD, EDS, EPMA analyses. Porosity significantly decreased and hardness also decreased with increasing annealing temperature. The inhomogeneous dendritic microstructure of cold sprayed coating material changed to the homogeneous and dense one (microstructural evolution) with annealing heat treatment. Oxides near the interface of particles could be reduced by heat treatment especially in vacuum and argon environments. Vacuum environment during heat treatment was suggested to be most effective one to improve the densification and purification properties of cold sprayed Cu-15 at.%Ga coating material.
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Citations
Citations to this article as recorded by - Manufacturing of Large-Scale Cold-Sprayed Ta Target Material and Its Sputtering Property
Gi-Su Ham, Dong-Yeol Wi, Jun-Mo Yang, Kee-Ahn Lee
Journal of Thermal Spray Technology.2019; 28(8): 1974. CrossRef - Effect of Hot Isostatic Pressing on the Microstructure and Propertiesof Kinetic Sprayed Nb Coating Material
Ji-Hye Lee, Sangsun Yang, Kee-Ahn Lee
Journal of Korean Powder Metallurgy Institute.2016; 23(1): 15. CrossRef - Fabrication and Microstructure/Properties of Bulk-typeTantalum Material by a Kinetic Spray Process
Ji-Hye Lee, Ji-Won Kim, Kee-Ahn Lee
Journal of Korean Powder Metallurgy Institute.2016; 23(1): 8. CrossRef - Effect of Heat Treatment Environment on the Microstructure and Properties of Kinetic Sprayed Tantalum Coating Layer
Ji-Hye Lee, Hyung-Jun Kim, Kee-Ahn Lee
Journal of Korean Powder Metallurgy Institute.2015; 22(1): 32. CrossRef - The Effect of Annealing Heat Treatment on the Microstructure and Macroscopic Properties of Kinetic-Sprayed Ta Coating Layer
Myeong Ju Lee, Jae Sung Oh, Hyung Jun Kim, Ik Hyun Oh, Kee Ahn Lee
Advanced Materials Research.2014; 893: 64. CrossRef - Manufacturing of Cu Repair Coating Material Using the Kinetic Spray Process and Changes in the Microstructures and Properties by Heat Treatment
Min-Gwang Jeon, Hyung-Jun Kim, Kee-Ahn Lee
Journal of Korean Powder Metallurgy Institute.2014; 21(5): 349. CrossRef - Manufacturing and Properties of CGI-based Composite Coating Layer Utilizing a Warm Spray Process and Cu-Ga and Cu-In Mixed Powders
Min-Gwang Jeon, Myeong-Ju Lee, Hyeong-Jun Kim, Kee-Ahn Lee
Journal of Korean Powder Metallurgy Institute.2014; 21(3): 229. CrossRef - Effect of Heat Treatment Environment on the Densification of Cold Sprayed Ti Coating Layer
Ji-Sang Yu, Hyung-Jun Kim, Ik-Hyun Oh, Kee-Ahn Lee
Journal of Korean Powder Metallurgy Institute.2012; 19(2): 110. CrossRef - Sintering and Rolling Behavior of Cu-50In-13Ga Ternary Alloy Powder for Sputtering Target
Dae-Won Kim, Yong-Ho Kim, Jung-Han Kim, Dae-Guen Kim, Jong-Hyeon Lee, Kwang-Bo Choi, Hyeon-Taek Son
Journal of Korean Powder Metallurgy Institute.2012; 19(4): 264. CrossRef
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